@article{TUW-291040, author = {Fuerst, Martin and Csencsics, Ernst and Berlakovich, Nikolaus and Schitter, Georg}, title = {Automated Measurement of Highly Divergent Optical Wavefronts with a Scanning Shack-Hartmann Sensor}, journal = {IEEE Transactions on Instrumentation and Measurement}, year = {2021}, volume = {70}, numpages = {9}, doi = {10.1109/TIM.2020.3038002}, keywords = {Shack-Hartmann wavefront sensor, Dynamic range extension, Optical metrology, Automatic optical inspection, Quality management, Error Budgeting} }
@article{TUW-295213, author = {Berlakovich, Nikolaus and Fuerst, Martin and Csencsics, Ernst and Schitter, Georg}, title = {Robust wavefront segment registration based on a parallel approach}, journal = {Applied Optics}, year = {2021}, volume = {60}, number = {6}, pages = {1578--1586}, doi = {10.1364/AO.413207} }
@article{TUW-289907, author = {Fuerst, Martin and Haider, Christian and Csencsics, Ernst and Schitter, Georg}, title = {Confocal chromatic sensor with actively tilted lens for 3D measurement}, journal = {Journal of the Optical Society of America A}, year = {2020}, volume = {37}, number = {9}, pages = {46--52}, doi = {10.1364/JOSAA.394212} }
@inproceedings{TUW-289906, author = {Fuerst, Martin and Berlakovich, Nikolaus and Csencsics, Ernst and Schitter, Georg}, title = {Self-Aligning Scanning Shack-Hartmann Sensor for Automatic Wavefront Measurements of High-NA Optics}, booktitle = {Proceedings of the IEEE International Instrumentation and Measurement Technology Conference (I2MTC 2020)}, year = {2020}, numpages = {6}, doi = {10.1109/I2MTC43012.2020.9128499}, keywords = {Shack-Hartmann wavefront sensor, Dynamic range extension, Optical metrology, Automatic optical inspection, Quality management}, note = {Vortrag: IEEE International Instrumentation and Measurement Technology Conference Proceedings I2MTC (2020), Dubrovnik, Kroatien; 2020-05-25 -- 2020-05-28} }
@inproceedings{TUW-281663, author = {Fuerst, Martin and Schitter, Georg}, title = {Scanning Wavefront Sensor for Measurement of Highly Divergent Wavefronts}, booktitle = {Proceedings of the Joint Conference 8th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2019), and 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019)}, year = {2019}, journal = {IFAC-PapersOnLine/Elsevier}, volume = {52/15}, numpages = {6}, doi = {10.1016/j.ifacol.2019.11.644}, keywords = {Freeform optics, optical metrology, wavefront measurement, scanning system, Shack-Hartmann sensor, surface metrology}, note = {Vortrag: Joint Conference 8th IFAC Symposium on Mechatronic Systems (MECHATRONICS 2019), and 11th IFAC Symposium on Nonlinear Control Systems (NOLCOS 2019), Wien; 2019-09-04 -- 2019-09-06} }
@article{TUW-273524, author = {Fuerst, Martin and Unger, Severin and Ito, Shingo and Schitter, Georg}, title = {Wavefront measurement based feedback control for automatic alignment of a high-NA optical system}, journal = {Journal of Physics: Conference Series}, year = {2018}, volume = {1065}, numpages = {4}, doi = {10.1088/1742-6596/1065/3/032001} }
@inproceedings{TUW-271223, author = {Fuerst, Martin and Unger, Severin and Ito, Shingo and Schitter, Georg}, title = {Wavefront measurement based feedback control for automatic alignment of a high-NA optical system}, booktitle = {XXII World Congress of the International Measurement Confederation (IMEKO)}, year = {2018}, numpages = {4}, note = {Vortrag: XXII World Congress of the International Measurement Confederation (IMEKO), Belfast (UK); 2018-09-03 -- 2018-09-06} }
@Conference{TUW-0612172, author = {Csencsics, E. and Ito, S. and Fuerst, M. and Cigarini, F. and Schitter, G.}, title = {Christian Doppler Laboratory Precision Engineering for Automated In-line Metrology}, booktitle = {1st GMAR workshop}, year = {2017} }