High-speed large format 3D printing

To overcome the speed limitation of stereolithography 3D printers in this project, a polygon mirror based light engine is developed, which enables a laser line scan speed of a few hundred meters per second. Read more →

AC-KPFM 2020 - 2024

The knowledge of the electrical surface charge distribution at the nanoscale is beneficial for many research areas including biological and material sciences. Kelvin Probe Force Microscopy (KPFM) is considered an eligible tool for the quantitative determination thereof. Current methods utilize a DC-Bias for the measurement of the charge distribution, which is not desirable when operating in liquid environments or on semiconductors. This project aims to bypass the parasitic effects of current methods and to enable quantitative surface potential measurments in DC-Bias critical environments. Read more →

Atomic Force Microscopy using self-sensing cantilevers

In Atomic Force Microscopy (AFM), micro-cantilevers with a sharp tip are scanned over a sample to measure various surface properties with nanometer resolution. The measurement of the cantilever deflection is a crucial part, which defines the imaging performance of AFM. Self-sensing cantilevers with integrated piezoresistive or capacitive elements enable a direct and efficient deflection measurement and are a promising alternative to the conventional optical lever method. This project aims at enabling novel AFM methods and applications by exploiting the advantages of self-sensing cantilevers. Read more →


Sub-micrometer scanning probe based characterization of RF products on wafer-level (SµRF) 2021 - 2024

RF systems belong to the key components of modern technologies such as radar for environmental detection for safe automated driving through night and fog and Internet of Things devices like 5G telecommunication chips. The goal of the SµRF project is the development of a wafer-level scanning probe system for characterization and testing of radio frequency (RF) and millimeter wave (mmWave) semiconductor products with sub-micrometer precision. Read more →

RF-AFM 2018 - 2021

The accurate measurement of local RF-voltages within integrated circuits is crucial for the development of miniaturized electronic devices. Contactless probing techniques are considered a promising approach to overcome the space limitations imposed by the size of required contact pads used in conventional probing techniques. This project aims at developing a scanning probe based measurement system capable of mapping voltages within RF-devices with sub-um spatial resolution. Read more →

Versatile technology platform for MEMS scan system for automotive safety applications (AUTOScan) 2021 - 2024

Advancements of sensors, communication and artificial intelligence are about to bring a revolutionary changes in mobility and transportation by autonomous driving. Scanning mirrors based on Micro-Electro-Mechanical Systems (MEMS) technologies are one of the promising solutions for various automotive applications, e.g. photonic sensing such as lidars and human machine interfaces such as augmented reality head -up display (AR HUD) and smart headlights. The AUTOScan project aims for automotive grade MEMS scanning systems for robust sensing and imaging in harsh automotive environmental conditions, enabling reliable MEMS lidars and AR HUDs. Read more →

PriMActO 2019 - 2022

This project aims for the analysis, development and integration of an active primary mirror cell for mid-sized telescope systems between 60 cm and 2 m. Based on an integrated mechatronic system design and a modular approach, an extremely lightweight construction as well as great imaging performance and cost-efficient solution shall be reached. Read more →

OptoFence klein

OptoFence 2020 - 2023

This project aims at the development of a telescope based, mobile, optical system for detection, tracking and identification of UAVs providing an increased operating distance. The integrated camera system allows realtime imaging and reconnaissance of an approaching object and therefore enables an in-depth analysis of the potential threat. Read more →

Precision robotic in-line metrology for freeform surfaces

High precision in-line measurements on free form surfaces are considered as a key factor for future industrial production. Robot-based measurement systems enable the required flexibility but are typically lacking the required precision. The scope of this project is the development of a measurement platform as end effector for a robot robot arm, carrying a measurement tool and compensating for environmental disturbances, enabling precision inline measurements. Read more →

Hybrid reluctance actuators for high precision motion

Next-generation high-quality motion systems require high-precision actuators with higher energy efficiency and larger force to improve the system throughput. Particularly, actuators with a motor constant higher than comparable voice coil actuators are highly desired. This project investigates hybrid reluctance actuators (HRAs) with guiding flexures as a promising candidate of next-generation systems. Read more →