RF systems belong to the key components of modern technologies such as radar for environmental detection for safe automated driving through night and fog and Internet of Things devices like 5G telecommunication chips. State of the art RF probing systems have a limited spatial resolution due to large contact pads of conventional ground-signal-ground probes and cannot measure signals within the active area of the RF structures.
SµRF will address this shortcoming by developing a flexible and versatile RF microscopy system up to 90 GHz using conductive atomic force microscopy (AFM) cantilever, which facilitates precision down to nanometer scale. Advanced control and positioning algorithms with camera-based and optical AFM readout enable RF probing with automated probe alignment and nanoscale spatial resolution. The developed RF scanning probe system is verified on mmWave circuit devices (MMIC) and on wafer-level to validate the capability for production in-line metrology. The unique RF measurements enable design cycles to be reduced, chip size to be shrunk and improve RF and mmWave products to be designed with increased spatial precision.