Vibration isolation is indispensable in many high-precision applications, both in industry and research. Prominent examples are wafer scanners, atomic force microscopes and large-scale reflecting telescopes. The stringent requirements cannot be met by purely passive systems and require active control strategies. Motivated by the high relevance, a suspension system for heavy loads with a levitating platform, active vibration suppression and integrated gravity compensation was designed, implemented and evaluated in this project.
The levitating platform has six degrees of freedom (DoF), which are actuated by Lorentz actuators due to their linearity and quasi-zero stiffness. In order to avoid heat dissipation, which may have a negative effect on sensitive equipment, zero-power gravity compensation is integrated. This is achieved by using electropermanent magnets (EPM) which, compared to other approaches, enable the adaption to a variable payload mass while keeping the operating point of the platform constant.
Particular attention has to be paid to the control design due to the conflicting goals of position control and vibration suppression. For the positioning of the platform, decentralised control is used with a suitable decoupling of the six DoFs. The displacement is measured with six eddy current sensors. Moreover, the platform is equipped with an accelerometer, which is used to apply acceleration feedback. This increases the effective mass and reduces the transmission of floor vibrations. To achieve a lower position control bandwidth, which reduces the transmission of low-frequency disturbances, the negative stiffness of the EPMs is compensated by a positive virtual stiffness.
The decentralised position control achieves a bandwidth of 60 Hz in the out-of-plane DoFs and 20 Hz in the in-plane DoFs with a resolution of less than 100 nm. For vibration isolation, the crossover frequency of the position control in the vertical direction is reduced to 6 Hz, resulting in an attenuation of floor vibrations with -40 dB/decade starting at around 8 Hz. With the additional acceleration feedback, the transmissibility was further reduced by almost 10 dB. The evaluation of the gravity compensation showed that it can support a total load of 6.34 kg while reducing the power consumption by 99 %.
Video Prototype of the vibration isolation system with a mounted mirror segment.
Austria Wirtschaftsservice (AWS) prototype funding (project name: AdLaS – Adaptive mounting system with powerless gravity compensation for mirror segments in large telescopes, project number: P2389218)