Precision actuator selection

Many applications require positioning with nanometer resolution. They include lithographic equipment for semiconductor and liquid crystal display (LCD) manufacturing and data storage devices such as hard disk drives (HDDs) and optical disk drives (ODDs) (e.g. CD/DVD/Blu-ray), as well as scientific instruments such as atomic force microscopes (AFMs). The achievable positioning resolution of these systems is typically influenced by vibrations transmitted from the floor. Read more →