Characterization of highly divergent optics (DOC)
Opto-mechatronic devices such as triangulation sensors or polychromatic confocal sensors project focused light beams onto the surface of the measuring object. Assessing the properties of the focused beam is essential as they are directly related to the achievable measurement resolution and precision of the opto-mechatronic device. Read more →
PDZ Learn Motion
The improvement of the process changeover of modular manipulators offers enormous potential for process optimization in small-series production. Current handling devices can not be converted quickly to new products and production processes sufficiently. Especially for SMEs, the cost of retrofitting the production plant usually exceed the benefits, which is why they cannot compete in the market. Read more →
Atomic Force Microscopy capable of vibration isolation (Vibrostop AFM)
An atomic force microscope (AFM) can image and inspect a sample surface with high resolution by scanning a probe with a sharp tip over the sample. During scanning, the vertical position of the probe with respect to the sample typically needs to be regulated with nanometer resolution. For the required high resolution, AFMs are sensitive to vibrations transmitted from the floor dependent on their design. Read more →
Component-based design of industrial control applications utilizing formal methods
The project scope includes the development of a library of standardized software components. Such software components enable a simplified implementation of industrial control applications by composition of such components on an abstract level. Furthermore, the library components already define integrated basic control functionality of the underlying hardware component and provide services for connecting several components in a flexible manner with each other (application integration). Read more →
Automated in-line metrology for nanopositioning systems (aim4np)
Within the scope of this project, a novel approach is developed for robot-based in-line metrology to isolate nanoscale measurements from environmental vibrations. Instead of isolating sample and robot from floor vibrations by means of passive or active vibration isolation aids, the distance between sample and metrology tool is kept constant. Read more →
Precision actuator selection
Many applications require positioning with nanometer resolution. They include lithographic equipment for semiconductor and liquid crystal display (LCD) manufacturing and data storage devices such as hard disk drives (HDDs) and optical disk drives (ODDs) (e.g. CD/DVD/Blu-ray), as well as scientific instruments such as atomic force microscopes (AFMs). The achievable positioning resolution of these systems is typically influenced by vibrations transmitted from the floor. Read more →