Imaging, handling and manipulation of material with high resolution are important techniques for various applications of research. Atomic force microscopes (AFM) are one of the most important tools for imaging applications with spatial resolution beyond the diffraction limit of light. The project aims is to build a basic AFM-system in cooperation with Anton Paar GmbH. Read more →


Project Noreia entitles the design and development of a highly sophisticated PVD deposition plant, which consider state of the art developments in automation and control as well as deposition techniques. The design and development is conducted in a framework between the Institute of Materials Science and Technology (Prof. Paul H. Mayrhofer) and the Faculty of Electrical Engineering and Information Technology within the Vienna University of Technology. Read more →

Fundamentals of opto-mechatronic systems (OMC)

Currently innovation is taking place at the border of disciplines rather than in one individual field of engineering. This particularly holds for application domains that span more than one field of engineering, since a high level of system integration from different disciplines provides solutions that a single domain alone cannot provide. As an example, the combination of optics and mechatronics form the interdisciplinary field of opto-mechatronics. Read more →

Scanning optical point- and line-sensor (SOS)

To overcome the limitation for better productivity and reliability of production in this project, a rotating or steering mirror scans the sensor’s optical point or line over a product surface, targeting triangulation, confocal, and color sensors. Read more →

Characterization of highly divergent optics (DOC)

Opto-mechatronic devices such as triangulation sensors or polychromatic confocal sensors project focused light beams onto the surface of the measuring object. Assessing the properties of the focused beam is essential as they are directly related to the achievable measurement resolution and precision of the opto-mechatronic device. Read more →

PDZ Learn Motion

The improvement of the process changeover of modular manipulators offers enormous potential for process optimization in small-series production. Current handling devices can not be converted quickly to new products and production processes sufficiently. Especially for SMEs, the cost of retrofitting the production plant usually exceed the benefits, which is why they cannot compete in the market. Read more →

Atomic Force Microscopy capable of vibration isolation (Vibrostop AFM)

An atomic force microscope (AFM) can image and inspect a sample surface with high resolution by scanning a probe with a sharp tip over the sample. During scanning, the vertical position of the probe with respect to the sample typically needs to be regulated with nanometer resolution. For the required high resolution, AFMs are sensitive to vibrations transmitted from the floor dependent on their design. Read more →

Component-based design of industrial control applications utilizing formal methods

The project scope includes the development of a library of standardized software components. Such software components enable a simplified implementation of industrial control applications by composition of such components on an abstract level. Furthermore, the library components already define integrated basic control functionality of the underlying hardware component and provide services for connecting several components in a flexible manner with each other (application integration). Read more →

Automated in-line metrology for nanopositioning systems (aim4np)

Within the scope of this project, a novel approach is developed for robot-based in-line metrology to isolate nanoscale measurements from environmental vibrations. Instead of isolating sample and robot from floor vibrations by means of passive or active vibration isolation aids, the distance between sample and metrology tool is kept constant. Read more →

Precision actuator selection

Many applications require positioning with nanometer resolution. They include lithographic equipment for semiconductor and liquid crystal display (LCD) manufacturing and data storage devices such as hard disk drives (HDDs) and optical disk drives (ODDs) (e.g. CD/DVD/Blu-ray), as well as scientific instruments such as atomic force microscopes (AFMs). The achievable positioning resolution of these systems is typically influenced by vibrations transmitted from the floor. Read more →